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Fujitsu and Advantest Establish Joint Venture for LSI Prototyping Services: e-Shuttle, Inc.

World’s first commercialization of electron beam direct lithography on wafers for 65nanometer technology

Fujitsu Limited,Advantest Corporation

Tokyo, October 30, 2006

Fujitsu Limited and Advantest Corporation today announced their agreement to establish on November 1 a new joint venture, e-Shuttle, Inc., to provide prototyping services for leading-edge large-scale integrated circuit (LSI) semiconductors. e-Shuttle will use electron beam direct lithography(1) technology that combines advanced semiconductor process technologies with electron beam exposure systems, to provide new LSI prototyping services for 65nm process technology. The services are scheduled to start in the first half of fiscal 2007 (April - September).

With the increasing diversification of the electronics market, there is a growing demand for faster development of products. For system LSIs made using leading-edge semiconductor process technologies, there is an increasing need to quickly produce small lots of prototype chips in order to test their functions and performance in actual products.

In view of these trends, e-Shuttle aims to create a development environment in which a wide variety of customers - including equipment manufacturers, research institutions, and universities - can easily use cutting-edge semiconductor process technologies, by providing new LSI prototyping services to enable shorter development periods than were available thus far.

e-Shuttle will develop electron beam direct lithography technology that can be applied to 65nm and 45nm process technologies. These technologies will be realized by combining Fujitsu's advanced semiconductor process technologies with Advantest's electron beam exposure system F3000 which was introduced to the market on October 24. e-Shuttle will be the world's first company to commercialize electron beam direct lithography for use on 300mm wafers for 65nm process technologies.

In addition to its electron beam services, e-Shuttle is considering future possibilities to take over Fujitsu's existing SiExpress™ prototyping services which use optical lithography, which would enable e-Shuttle to provide comprehensive LSI device prototyping services to meet a diverse range of customer needs. e-Shuttle will begin providing 65nm process prototyping services to customers as a new development environment in the first half of fiscal 2007 (April - September), and is planning to offer services for 45nm process technology in the future.

Overview of e-Shuttle

Company Name:
e-Shuttle, Inc.

Within Fujitsu's facilities in Kawasaki, Japan

Haruo Tsuchikawa (Concurrent: Board member, Fujitsu Laboratories Limited; Executive Vice President, Electronics Devices Business Unit, Fujitsu Limited)

100 million JPY (Total capital by fiscal 2007: 2.5 billion JPY)

Shareholder Ratio:
Fujitsu 55%, Advantest 45%

Date of Establishment:
November 1, 2006

Business Operations:
Development of electron beam direct lithography technologies for 65 and 45 nanometer process technologies; establishment and offering of semiconductor prototyping services.

  • [1] Electron beam direct lithography

    A technology in which circuit patterns for semiconductor devices are drawn on a wafer, by using a beam formed by accelerating and concentrating electrons.

About Fujitsu

Fujitsu is a leading provider of customer-focused IT and communications solutions for the global marketplace. Pace-setting device technologies, highly reliable computing and communications products, and a worldwide corps of systems and services experts uniquely position Fujitsu to deliver comprehensive solutions that open up infinite possibilities for its customers' success. Headquartered in Tokyo, Fujitsu Limited (TSE:6702) reported consolidated revenues of about 4.8 trillion yen (US$40.6 billion) for the fiscal year ended March 31, 2006. See for further information.

About Advantest

Advantest Corporation is the world's leading automatic test equipment supplier to the semiconductor industry, and also produces electronic and optoelectronic instruments and systems. A global company, Advantest has long offered total ATE solutions, and serves the industry in every component of semiconductor test: tester, handler, mechanical and electrical interfaces, and software. Its logic, memory, mixed-signal and RF testers and device handlers are integrated into the most advanced semiconductor production lines in the world. Founded in Tokyo in 1954, Advantest established its first subsidiary in 1982, in the USA, and now has 40 subsidiaries worldwide. Among them, Advantest America, Inc. is based in Santa Clara, CA., and Advantest (Europe) GmBH is based in Munich, Germany. More information is available at

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All product and company names mentioned herein are trademarks or registered trademarks of their respective owners. The information provided in this press release is accurate at time of publication and is subject to change without advance notice.

Date: 30 October, 2006
City: Tokyo
Company: Fujitsu Limited, Advantest Corporation, , , ,